CHARACTERISTICS
- Technology
- Pirani
- Display
- digital, without display
- Vacuum range
-
Max.: 1,000 mbar (14.503773773 psi)
Min.: 0 mbar (0 psi)
DESCRIPTION
BPG402 ATM to Ultra-High Vacuum Gauge The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors. Benefits Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere) Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5% Pirani interlock protects the filament from premature burnout Two long-life yttrium oxide coated iridium filaments Optional graphic display and Fieldbus interfaces available Automatic high vacuum Pirani adjustment reduces operator interventions Easy to exchange sensing element with on-board calibration data guarantees high reproducibility RoHS compliance Typical Applications Pressure measurement in semiconductor process and transfer chambers Industrial coating General vacuum measurement and control in the low to ultra high vacuum range
